Cooldown Monitor
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Cryo Temp
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Cryo Setpt
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Camera Temperatures
Cryo Temp
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Cam Heater Temp
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Det Heater Temp A
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Cam Overflow Temp
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Cryo Setpt
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Cam Heater Setpt
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Det Heater Setpt
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MOS Temperatures
MOS Heater Temp
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MOS Overflow Temp
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MOS Heater Setpt
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Pressures
Camera Pressure
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MOS Pressure
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Foreline Pressure
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Rack Temperatures
Rack 1 Temp 1
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Rack 1 Temp 2
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Rack 2 Temp 1
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Rack 2 Temp 2
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Rack 2 Temp 3
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Chamber Conditions (edgetech2)
Temp °C
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Temp °F
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RH
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Dew Point °C
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Dew Point °F
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Outside RH
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Choose Plot Range:
30 Min.
1 Hr.
2 Hr.
6 Hr.
24 Hr.
48 Hr.
1 Wk.
To pan along any chart while zoomed in, hold SHIFT and drag